| 摘要 |
PURPOSE:To perform the positioning of a focus with no wasteful time in a highly accurate manner by a method wherein the delay time up to the point of time of measurement of an air microsensor is selected taking into consideration of the positional relation of an air sensor nozzle and a wafer when measurement is performed using an air microsensor, and the value of measurement is taken in after lapse of the delay time. CONSTITUTION:The minimum period of time required in which the output voltage of an air sensor is taken in is selected for each shot as the delay time up to the point of time of measurement based on the shot arrangement information, and the measured value is taken in after lapse of said delay time. As a result, the positioning is performed on the surface of image formation and the surface of an object in a short period in a highly accurate manner. |
