发明名称
摘要 PURPOSE:To detect accurately whether or not the invariably-adequate supply of a wire is carried out, by detecting a difference between the heights of a wedge before and after the vibration after the pressure welding of the wire to a welded surface by the wedge. CONSTITUTION:To the terminal part of horn 14 with an incorporated ultrasonic oscillator, wedge 16 is fitted which vibrate wire 15 by pushing. Supporting rod 17 of horn 14 is provided with capacity displacement meter 19, which is connected to the decision control mechanism with the decision circuit. On receiving information on the difference between the heights of the wedge before and after the period from the stop of the lowering of wedge 16 toward sample table 18 to the vibration of wedge 16, the decision circuit makes a decision on whether the information is above a set value or not and then sends the output to the control system. When the information is above the set value, wire bonding is carried on and when below it, wire bonding is stopped and the alarm signal is operated.
申请公布号 JPS609664(B2) 申请公布日期 1985.03.12
申请号 JP19780057635 申请日期 1978.05.17
申请人 HITACHI LTD 发明人 TAKASHIMA KAZUHISA
分类号 B23K20/00;H01L21/60;H01L21/607 主分类号 B23K20/00
代理机构 代理人
主权项
地址