A TEMPERATURE CONTROL SYSTEM,申请号GB19700034644-传众专利搜索

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发明名称	A TEMPERATURE CONTROL SYSTEM
摘要
申请公布号	GB1298497(A)	申请公布日期	1972.12.06
申请号	GB19700034644	申请日期	1970.07.17
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人
分类号	C30B25/16;C23C16/52;G05D23/19;G05D23/27;H01L21/205	主分类号	C30B25/16
代理机构		代理人
主权项
地址

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