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发明名称
摘要
申请公布号
JPS609665(B2)
申请公布日期
1985.03.12
申请号
JP19770117116
申请日期
1977.09.29
申请人
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
发明人
FUKUYAMA TOSHIHIKO;OOTSUKA HIDEO;SUGITA MASAO
分类号
H01L29/73;H01L21/331;H01L21/74;H01L21/76;H01L21/762;H01L21/822;H01L27/04;H01L29/72
主分类号
H01L29/73
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代理人
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