| 摘要 |
PURPOSE:To enable to manufacture a semiconductor device having high manufacturing yield, and having high quality and high reliability by a method wherein mechanisms to make a heating body built-in with heaters of a large number of pieces to ascend and descend respectively at regular time and abnormal time are provided. CONSTITUTION:An arm 26 fitted to the edge part of a shaft 24 for abnormal time is provided to an abnormal time heating body elevating mechanism 25. A pin 27 is penetrated to the arm 26, and bearings 29a, 29b are fitted rotation freely to both the edge parts of the pin 27 interposing spacers 28 between them. The bearing 29a on one side comes in contact with the peripheral surface of a cam 18' fitted to a cam shaft 18a. Namely, the cam shaft 18a is rotated according to driving of a first driving source to rotate the cams 18, 18', a shaft 10 and the shaft 24 for abnormal time ascend and descend according to interlock of the bearings 17a, 29a and the arms 14, 26, and a heating body 1 ascends and descends. At abnormal time, the heatinb body 1 is made to perform ascent and descent motion by one stage moreover from the regular condition according to action of the abnormal time heating body elevating mechanism 25 in addition to action of a heating body elevating mechanism 13. |
