| 摘要 |
PURPOSE:To carry out the patterning of a part which is not used as an electrochromic layer by exposing the part to an atmosphere of H2O excited by glow discharge to deprive the part of its electrochromic function. CONSTITUTION:The 1st electrode 2 is formed on each substrate 1, and the substrate is fixed 18 on a holder 13. An electrochromic layer 3 of WO3 is formed on the electrode 2 by a vacuum deposition method by means of an electron gun 12 using WO3 as an evaporating material, and an insulating layer 4 is further formed. After forming the layers, the substrate is masked, and glow discharge is caused in an atmosphere of H2O introduced from a steam feeding source 16. Desired patterning action is attained by the glow discharge. The 2nd electrode 5 is then formed on the layer 2. |
