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发明名称
ILLUMINATING SYSTEM OF PROJECTING AND EXPOSING DEVICE
摘要
申请公布号
JPS6045252(A)
申请公布日期
1985.03.11
申请号
JP19830152474
申请日期
1983.08.23
申请人
CANON KK
发明人
MATSUKI TOSHIO
分类号
G03B27/54;G03F7/20;H01L21/027;H01L21/30
主分类号
G03B27/54
代理机构
代理人
主权项
地址
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