| 摘要 |
PURPOSE:To suppress vibration generated in a machining device so as to enable the device to perform accurate machining, by arranging springs respectively bettween the bottom wall face and the main piston, between the upper wall face and a balancing piston and between the both pistons in a cylinder chamber of a pneumatic device causing low frequency vibration. CONSTITUTION:A cylinder chamber 9 of a pneumatic device arranges the first and the second springs 25, 26, forcing a main piston 7 to be pressed to the side of a balancing piston 8 and the balancing piston 8 to be pressed to the side of the main piston 7, and the third spring 27 between the both pistons 7, 8. An ultrasonic vibrating part and the pneumatic device, which are driven by an oscillating machine 28 and a compressed air source 29, operate to apply vibration overlapping ultrasonic and low frequency vibrations to a tool 1 and efficiently perform accurate machining. Then the second and the third springs 26, 27 cooperatively act with the first spring 25 to cancel inertia force of the respective mass in both systems of the ultrasonic and low frequency vibrations and relax a shock by vibration to an outer cylinder 6 when the low frequency vibration is applied. |
