| 摘要 |
PURPOSE:To perform exact working with less working strain by providing a circuit for compensating working deformation and applying the output signals from said circuit as input signals to a laser beam driving part. CONSTITUTION:The output coordinate signals Vx, Vy from a part 6 for generating working signals are respectively converted by a circuit 70 for compensating working deformation to Vx1, Vy1 which are inputted to a laser beam driving part 2. The constants in scale-factor elements 74, 79 are thereupon adequately set, by which the combined deformation consisting of the positional deformation of a laser spot occuring in the aberration of a condenser lens and the positional deformation in the X-axis direction of the laser spot interfered by the inclining condition of a Y-axis mirror 22 is mostly compensated. The exact pattern corresponding to the signals Vx, Vy is thus formed on the work by the laser spot. |
