| 摘要 |
PURPOSE:To suppress vibration of a device so as to perform high accurate machining, by setting the first and the second springs, which force a holding member mounted to the vibrative node of an ultrasonic vibrating part to be pressed to the side of a low frequency vibrating part and the low frequency vibrating part to be pressed to the side of the holding member, further providing the third spring between the both vibrating parts. CONSTITUTION:An ultrasonic vibrating part comprises an electrostrictive vibrator 3 connected to a horn 2 fixed to a tool 1. A low frequency vibrating part, comprising a holding member 5 connecting one end of a plunger 6, the plunger 6, bobbin 7, winding 8, stator 9, screw 10 and a plate 11, is slidably inserted into an outer cylinder 12. The ultrasonic and low frequency vibrating parts, if they are driven by oscillating machines 19, 20 respectively, apply vibration overlapping the ultrasonic and low frequency vibrations to the tool 1 to perform high efficient machining, but the low frequency vibration relaxes a shock due to vibration to the outer cylinder 12 by moving the respective mass of the ultrasonic and low frequency vibrating parts in an opposite direction so as to cancel inertia force by the cooperative action of the second and the third springs 17, 18 with the first spring 16. |
