| 摘要 |
PURPOSE:To decrease the number of masks to be prepared and to reduce cost by using a mask having apertures of the pattern including all the elements of plural kinds of marking patterns and using the same by shielding the apertures unnecessary for the marking pattern. CONSTITUTION:Light shielding plates 7 shield a part of apertures 4 of a mask 3a and are provided by as much as the number of the apertures required to be shielded. Linear motion mechanism 8 is provided for each of the plates 7 in order to move in and out the plates 7. The apertures 4 unnecessary for marking of the mask 3a are shielded by the plates 7 by driving adequately the mechanisms 8 to allow passage of the laser light only through the necessary apertures 4, by which the surface of an object 5 is subjected to desired marking. The number of the masks to be prepared is thus decreased and the automatic change of the mask pattern is made extremely easy. |
