| 摘要 |
PURPOSE:To enable to easily have a cassette guided along a guiding part and housed in a supporting frame even when the descending position to a supporting frame used by a carrier robot is deviated by a method wherein an inclined guide part which is bent outward is provided at the end part on the four sides of the aperture part of a cassette supporting frame. CONSTITUTION:A guide part 12 which is bent and inclined outward is provided on the end parts 11a located on the four sides of the aperture part of a supporting frame 11. As a result, the cassette pinched by a chuck of a carrier robot is brought to the point above the supporting frame 11 in horizontal position, the cassette comes down along the guide part 12 of the aperture end parts 11a, and guided in the supporting frame 11 and housed there. |
