| 摘要 |
PURPOSE:To form a thin film having uniform thickness and quality over the entire part of a base body having a large area by disposing coaxially said base body to be formed thereon with the thin film as the 2nd electrode in a cylindrical body of the 1st electrode, introducing a reactive gas into said body while rotating the base body and generating glow discharge between both electrodes. CONSTITUTION:A cylindrical body 4 provided with many reactive gas introducing holes 6 is placed on an electrically insulated O-ring 3. Said body is used as the 1st electrode and a base body 18 having a large area to be formed thereon with a thin film is disposed as the 2nd electrode and is attached to a revolving shaft 17. A shielding member 19 having a cage-shaped construction is attached in proximity to the outside thereof. The body 18 is heated with a heater 2 and a reactive gaseous raw material is introduced through an introducing pipe 9 into the body 4 under vacuum. The body 18 is rotated around the shaft 17 together with the member 19 and a high frequency voltage is impressed between the body 4 and the body 18 by a power source 22 to generate glow discharge between both bodies and to convert the gaseous raw material into plasma, thereby forming uniformly the thin film on the surface of the body 18. |
