| 摘要 |
PURPOSE:To improve wear resistance and heat conductivity by using ceramics consisting principally of SiC for both or either of a base substrate and a substrate for protection. CONSTITUTION:The thin film magnetic head is manufactured by using SiC ceramics which has heat conductivity equal to or higher than Si single crystal as the base substrate. Namely, a lower magnetic layer 2 is formed by sputter vapor deposition over the entire surface of the base substrate 1 made of the SiC ceramics, and an insulating layer is further vapor-deposited thereupon. Then, a conductor layer 3 for a coil is vapor-deposited and patterned by dry etching. Another insulating layer is formed thereupon by a mask sputtering method to cover a lead line connection part, and then an insulating layer whose thickness is equal to working gap length (g) is formed newly except where the working gap length is formed. Then, only the insulating layer of the rear connection part of the lower magnetic layer 2 is removed to form an upper magnetic layer 4 over the entire surface by sputter vapor-deposition, and the layer is patterned. An insulating layer 5 is further formed thereupon, a protecting substrate 7 is adhered to with an adhesive 6, and the whole body is cut. |
