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发明名称
CROSS-FIELD DIODE SPUTTERING TARGET ASSEMBLY
摘要
申请公布号
GB8502920(D0)
申请公布日期
1985.03.06
申请号
GB19850002920
申请日期
1985.02.05
申请人
FOURNIER, P R
发明人
分类号
C23C14/36;C23C14/35;H01J37/34;H01L21/203
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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