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发明名称
ANORDNUNG ZUR INTERFEROMETRISCHEN EBENHEITSPRUEFUNG TECHNISCHER OBERFLAECHEN
摘要
申请公布号
DD219565(A1)
申请公布日期
1985.03.06
申请号
DD19830257478
申请日期
1983.12.05
申请人
ADW DER DDR,DD
发明人
SCHWIDER,JOHANNES,DD;SPOLACZYK,REINER,DD;ELSSNER,KARL-EDMUND,DD
分类号
G01B11/30;(IPC1-7):G01B9/02
主分类号
G01B11/30
代理机构
代理人
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地址
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