| 摘要 |
PURPOSE:To improve the yield and to reduce the dispersion of characteristics by forming the ratio of an electrode finger width to an electrode finger interval to a prescribed value and widening the electrode finger width in forming an interdigital transducer electrode. CONSTITUTION:A resist film 3' is constituted so as to obtain the ratio S/L of the electrode finger width L and the electrode finger interval S as nearly 0.8-0.2 and exposed and developed. In this case, the electrode finger pitch is taken as a wavelength lambda of a prescribed resonance frequency. Since the electrode finger width L is wide in this case, it is prevented easily that the electrode finger 2' is too small, and also the generation of side etch caused for low frequency region is prevented and further, pattern break or the like caused for high frequency region is prevented easily. Thus, the interdigital transducer (IDT) electrode with good yield and less dispersion in characteristics is obtained. |
