| 摘要 |
PURPOSE:To enable any plane of a specimen to be observed without rotating the specimen by providing a double shaft inclining mechanism on which the specimen is loaded and display device for indicating a mark for representing the directions of said inclined shafts and forcing the specimen to automatically incline toward the mark. CONSTITUTION:X, Y moving tables 4X, 4Y for a parallel movement are mounted on a double shaft inclining table 1 rotatably mounted around axes 2X, 2Y, on which a specimen 5 is placed. A signal from a secondary electron detector 14 is supplied to a cathode ray tube 13 and displayed, while a bright line representing the directions of the inclination shafts of the inclining table 1 is displayed by means of a bright line display signal adder 10. The bright line is inclined to a horizontal axis by the operation of an input device 19, while the inclining table 1 is driven by an arithmetic operation control part 18 via a driving circuit 17, allowing the specimen 5 to make coincidence with the bright line as well as the specimen to be inclined. Accordingly, the specimen 5 can be inclined only with the rotation of a mark on a screen to permit any plane to be observed, allowing the operatability of the captioned electron microscope to be improved. |
