| 摘要 |
PURPOSE:To enable to measure digitally and in a high speed contact and noncontact of the desired teeth of a comb type pattern from pads provided in common to the comb teeth of the plural number at a measurement of preciseness of the pattern by a method wherein a transistor switch provided to every one piece of the comb teeth is made to perform make and break. CONSTITUTION:To measure the number of pieces making cntact of the comb teeth of a comb type pattern 1, transistor switches 4 are made to the ON-state from a transistor switch controlling pad 5, and trasistor switches 4a are made to the OFF-state from a transistor switch controlling pad 5a. By measuring the currents of current measuring pads 6 acording to a current measuring device 7 in this condition, the number of pieces making contact of the comb teeth of the comb type pattern 1 can be measured. To measure the number of pieces making contact of the comb teeth of a comb type pattern 1a, the transistor switches 4 are made to the OFF-state, and the transistor switches 4a are made to the ON- state. By constructing the measuring device in such a circuit construction, a high speed measurement can be attained, and enlargement of the number of pads to be caused with the increase of the number of measuring points can be avoided. |
