| 摘要 |
PURPOSE:To obtain a thin film type magnetic recording medium havng an overcoat layer with superior wear and corrosion resistances by forming an org. plasma-polymerized layer contg. silicon on a magnetic layer so that the refractive index is adjusted to a specified value or above. CONSTITUTION:A support 10 having a magnetic metallic (alloy) film vapor-depodited on a polyethylene terephthalate film is sent from a sending reel 11 in a sending chamer 3 to a winding reel 13 through an electric discharge chamber 2. In the chamber 2, a mixture of a compound contg. silicon such as vinyltrimethoxysilane with O2, N2 and H2 as plasma-nonpolymerizable gases is fed from small holes in the edge of an upper electrode 6 to the chamber 2 through the slender pipe of the electrode 6, gaseous Ar or the like is sent from inlets 14 as required, and high frequency power is applied to a lower electrode 7 to form an evercoat layer of an org. plasma-polymerized substance contg. Si and having >=1.45 refractive index on the magnetic film. The thickness of the overcoat layer is 20-1,000Angstrom . Thus, a magnetic recording medium having a small spacing loss and superior traveling performance without reducing the reproduction output is obtd. |
