| 摘要 |
PURPOSE:To eliminate the deterioration of a pulse shape by forming contact holes on transfer electrodes having the same phase on each transfer channel at every phase number and connecting the transfer electrodes having the same phase in common by a low resistance electrode. CONSTITUTION:Contact holes 34-42 are bored to first layer or second layer polysilicon electrodes. Vertical transfer pulses are transmitted from aluminum wirings in the vertical direction. Accordingly, spaces among bus lines are brought to approximately several dozen mum because the bus lines are wired by aluminum at every four picture elements regarding one horizontal line such as 21 in vertical transfer electrodes, and the deterioration of a pulse shape can be ignored approximately. |
