| 摘要 |
PURPOSE:To obtain the titled film suitable for the photomask protective film, the separative film, etc. free from wrinkles, sagging by sticking a different polymeric film tightly to a base polymeric layer, bonding a frame with said polymeric film and then dissolving and removing the base polymeric layer. CONSTITUTION:A solvent soluble film (for example, biaxial oriented polystyrene film etc.) is used as a base polymeric layer, fed continuously by a film coating device, the polymeric solution (such as nitro cellulose methylcellosolve, 7% concentrated etc.) is applied to it to form the desired polymeric film and dried. Then, while feeding the film continuously as it is, a frame (such as an aluminium frame etc.) is stuck to the polymeric film, passed through a hardening oven then brought to a chamber for melting and removing the base polymeric layer, and said polymeric layer as dissolved and removed by a solvent (such as 1,1,1- trichlorethane etc.) through a spray to obtain the desired film. |
