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发明名称
SELECTIVE ETCHING PROCESS
摘要
申请公布号
GB2144083(A)
申请公布日期
1985.02.27
申请号
GB19840018797
申请日期
1984.07.24
申请人
* AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
JOEL MALCOLM * COOK;VINCENT MICHAEL * DONNELLY;DANIEL LAWRENCE * FLAMM;DALE EDWARD * IBBOTSON;JOHN AARON * MUCHA
分类号
H01L21/302;C04B41/53;C09K13/08;C23C16/44;C23F1/12;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):C23F1/00;C30B33/00
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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