SAMPLE STAGE

摘要

PURPOSE:To eliminate beam position error due to leakage magnetic field from an object lens by forming a sample holder and a pedestal with a semiconductor material such as ceramics or a semiconductor material covered with conductive material thin film on the occasion of providing a pedestal for placing sample holder on the sample stage which constitutes an electron beam drawing device. CONSTITUTION:The square pedestal 1 having the sliding legs 3 at the lower surfaces of four corners is provided on a rectangular surface plate 4 having a flat Y guide 10 protruded upward to both ends provided opposingly and a roller 9 provided at the end surface of X reference guide 5 between the sliding legs is rolled on the Y guide 10. The Y reference guide groove 6' is formed at the surface plate 4 orthogonal to the X guide 5, a Y slide rod 8 is inserted thereto and the pedestal 1 is slid in the direction Y by a drive shaft 12. Moreover, the sample holder 2 is fixed on the pedestal 1 and in this case both pedestal 1 and holder 2 are formed by semiconductor material and thereby induction current by leakage magnetic field can be reduced remarkably and electron beam projecting position error can be eliminated.