| 摘要 |
PURPOSE:To obtain a photoelectric conversion element having scanty noise, and enabled to be formed in a high detailed type by a method wherein holes to connect electrically between a light shieldingly conductive layer and a transparent electrode are provided in a transparently insulating layer. CONSTITUTION:When a transparently insulating layer 6 is to be formed, slits of two pieces are formed interposing an interval a little larger than width in the arranging direction of electrodes 2 between them according to the lift off method to be used as holes 6a for conduction between a transparent electrode 4 and a light shieldingly conductive layer 5'. The holes 6a thereof are formed in the shape extended in the arranging direction of the electrodes 2 in the range existing the transparent electrode 4. Moreover, Gr or Al is evaporated on the transparently insulating layer 6 thereof to form the light shieldingly conductive layer 5'. At this time, the light shieldingly conductive layer 5' is formed in a shape having a slit part 5a' of width of the electrodes 2 thereof in the direction arranged with the electrodes 2. The lift off method is performed by forming a resist pattern, while high precise positioning can be attained. When a photoelectric conversion element is formed in such a construction, because light hnu irradiated to the part overlapped with a signal lead out part 2a, a photoelectric conversion layer 3 and the transparent electrode 4 is shielded by the light shieldingly conductive layer 5', generation of noise from this part can be checked. |
