| 摘要 |
PURPOSE:To effect the growth of uniform single crystal, and to prevent the breakage of the crucible by thermal stress, by placing a magnet device to apply a magnetic field near the upper and the lower parts of the pulling surface of a single crystal, thereby suppressing the thermal convection at the upper part of the molten liquid and stirring the lower part of the liquid. CONSTITUTION:The objective single crystal pulling apparatus is composed of the main body of the pulling apparatus to pull up the seed crystal immersed in the molten liquid 1 of the raw material of the crystal to form the single crystal, and the magnet device to apply a magnetic field to the molten liquid 1. The magnet device is a superconductive magnet consisting of the magnet 28 to suppress the thermal convection near the boundary layer 6 between the solid and liquid interface of the molten liquid 1 and the magnet 29 to generate the rotary magnetic field to stir the part lower than the boundary layer 6. The magnet 28 is directed to generate the magnetic field perpendicular to the pulling direction of the single crystal, and the magnet 29 is placed to direct the magnetic field parallel to the pulling direction. |
