摘要 |
In a semiconductor switch for use in a telephone exchange, interference between separate switching units located on a single chip is frequently a problem. To overcome this, a semiconductor switch is provided with a plurality of islands of silicon monocrystal disposed in a supporting body of silicon polycrystal through a dielectric film having a plurality of switching circuit islands, at least one driving circuit island, and a plurality of protective circuit islands, wherein a region to reduce parasitic capacitance is formed between said switching circuit islands by arranging the switching circuit islands to be isolated from one another through said region. |