| 摘要 |
PURPOSE:To obtain a highly reliable, high-performance, infrared-ray radiation thermometer, by the constitution wherein a thickness of a piezoelectric substrate is more than 30mum and less than 60mum, and the surface roughness of the back surface of the piezoelectric substrate is less than 0.2mum. CONSTITUTION:An LiNbO3 single crystal plate is used as a piezoelectric substrate 13. The propagating direction of an elastic surface wave is the direction of a Z axis. Cross finger type electrodes 11 and 12 are formed by an evapolated Al film with a thickness of about 0.15mum. The interval between the electrodes is about 3mm.. The thickness of the substrate 13 is more than 30mum and less than 60mum. The surface roughness of the back surface of the substrate 13 is less than 0.2mum. Thus a highly reliable, high-performance oscillator can be implemented, and an excellent infrared-ray radiation thermometer can be implemented. |
