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发明名称
ELLIPSOMETER
摘要
申请公布号
SU1141297(A1)
申请公布日期
1985.02.23
申请号
SU19833652889
申请日期
1983.10.18
申请人
LE I TOCHNOJ MEKHANIKI OPTIKI
发明人
ALEKSEEV SERGEJ A,SU;BRONSHTEJN IGOR G,SU;PROKOPENKO VIKTOR T,SU;RONDAREV VITALIJ S,SU
分类号
G01J4/04;(IPC1-7):G01J4/04
主分类号
G01J4/04
代理机构
代理人
主权项
地址
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