| 摘要 |
PURPOSE:To provide a titled device which provides a gallium arsenide single crystal having high quality by providing a blind cylinder in the opening part of a high pressure vessel, and providing a means for blowing arsenic into a melt by sliding a supporting bar fixing an arsenic contg. vessel in the blind cylinder. CONSTITUTION:The opening end of a blind cylinder 15 is airtightly connected to the opening 14 in the upper side wall of a high pressure vessel 1. A supporting bar 18 is provided in the cylinder 5 and an arsenic contg. vessel 16 is fixed to the top end thereof. A permanent magnet 20 is provided to the rear end of the bar 18, and a permanent magnet 19 is fixed externally to the cylinder 15. Raw materials such as Ga, As, B2O3 or the like are put in a crucible 3 and are melted, then the current value is measured to detect the compsn. ratio of the raw materials. If As portion is found to be deficient, the annular magnet 19 fitted to the cylinder 15 is dropped to bring an arsenic vessel 16 to near the crucible 3 so that the top end of a pipe 17 is thrusted into the GaAs melt 7. The As in the vessel 16 is heated to form As vapor which is blown into the melt 7. When the compsn. of the melt is adjusted, a seed crystal 9 is rotated and the pulling-up operation is started. |
