| 摘要 |
PURPOSE:To perform stable and high-precision position control by detecting information related to displacement of an actuator in accordance with information of the temperature or the resistance of a shape memorizable alloy constituting the actuator and a force applied to the actuator. CONSTITUTION:An actuator 9 consists of a shape memorizable alloy body 10 consisting of NiTi or the like, an auxiliary driving part 11 consisting of an elastic material such as a spring or the like to which an elastic distortion is fed preliminarily, and a connecting part 12 which connects them. A displacement calculating part 16 calculates a displacement (x) of the actuator in accordance with a force signal Vf and a temperature signal Vt and outputs a displacement signal xc proportional to the displacement (x). A comparator 17 calculates a deviation DELTAx between a reference signal xr and the displacement signal xc, and a driving part 18 supplies power to heat the alloy body 10 with a current I proportional to the signal DELTAx, and the actuator 9 is driven. Then, the displacement signal xc is shifted to a value approximating the signal xr, and the deviation DELTAx is reduced sufficiently. As the result, the displacement of the actuator 9 is held in proportion to the value of the signal xr. |
