| 摘要 |
PURPOSE:To obtain a medium with excellent regenerative output characteristics and corrosion resistance by a method wherein a magnetic layer, which is composed of a main component Fe, doped components Co and Ni and any one of Mn or Cu, is formed on a non-magnetic substrate by a thin film deposition method. CONSTITUTION:A film pay-out shaft 2, a take-up shaft 3, intermediate free rollers 4 and a cooling can 5 are provided in a vacuum chamber 1. A container 7 which contains evaportion material 6 and an electron beam source 8 which heats the material 6 are provided beneath the can 5. The inside of the chamber 1 is maintained at 1X10<-4>-5X10<-6>Torr by an evacuating equipment 10. A vapor flow 6' from the material 6 is guided by an adhesion protecting board 11 and the evaporated material is deposited on a film 9 which is transferred on the surface of the can 5. The composition of the deposited magnetic layer is (Fe1-xCox)1-(a +b)NiaXb, where X means Mn and/or Cu and weight composition ratios are specified as 0<x<0.5, 0.05<a<0.25 and 0.01<b<0.20. |
