发明名称 |
Trichlorosilane production process and equipment. |
摘要 |
<p>@ A process for producing trichlorosilane and equipment for practicing that process are disclosed. The process is a two stage process which combines the reaction of silicon tetrachloride and hydrogen with silicon and the reaction of hydrogen chloride with silicon. In one embodiment of the invention a two stage reactor (10) is provided with a first stage (12) heated to a temperature of about 500-700 °C and a second stage (14) maintained at a temperature of about 300-350 °C. Each of the first and second stages of the reactor are charged with silicon particles (47, 51). A mixture comprising hydrogen and silicon tetrachloride are flowed through the silicon particles in the heated first stage to cause a partial hydrogenation of the silicon tetrachlorid. The effluent from the first stage includes trichlorosilane and unreacted hydrogen and silicon tetrachloride. Hydrogen chloride is added to this effluent and the mixture of gases are passed through the silicon particles in the second stage of the reactor.</p> |
申请公布号 |
EP0133209(A2) |
申请公布日期 |
1985.02.20 |
申请号 |
EP19840107033 |
申请日期 |
1984.06.19 |
申请人 |
MOTOROLA, INC. |
发明人 |
INGLE, WILLIAM M.;PEFFLEY, MARILYN SUE;SETTY, H.S. NAGARAJA |
分类号 |
C01B33/035;C01B33/107;(IPC1-7):C01B33/107;C01B33/02 |
主分类号 |
C01B33/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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