DRY ETCHING METHOD OF ALUMINUM,申请号JP19830142919-传众专利搜索

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发明名称	DRY ETCHING METHOD OF ALUMINUM
摘要
申请公布号	JPS6033367(A)	申请公布日期	1985.02.20
申请号	JP19830142919	申请日期	1983.08.04
申请人	NIPPON DENKI KK	发明人	KASAI NAOKI
分类号	C23F4/00;C23F1/12;H01L21/302;H01L21/306;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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