| 摘要 |
A sensor which has an insulating substrate on which is formed a heater layer for heating the sensor on a part thereof and which is operated above a predetermined temperature. The heater layer is made of a material which has a thickness of 0.2 mu m to 20 mu m and which is made of platinum, rhodium, palladium or a mixture thereof. The insulating substrate is made of alumina, quartz, spinel, magnesia, zirconia, or mixtures thereof. A heater protective layer having a thickness of 0.01 mu m to 500 mu m is made of materials based on alumina, silica, spinel, magnesia, zirconia or mixtures thereof.
|
