发明名称 Semiconductor devices utilizing eutectic masks
摘要 A method is described for making self-aligned doped regions in a body of semiconductor material by means of an in situ eutectic mask formed by the selective removal of one of the phases of a metallic eutectic solidifed as a thin film having a lamellar morphology. The elements of the in situ mask may also be utilized as metallic contact lines or interconnecting metallic stripes of a semiconductor device.
申请公布号 US4500898(A) 申请公布日期 1985.02.19
申请号 US19820395761 申请日期 1982.07.06
申请人 GENERAL ELECTRIC COMPANY 发明人 CLINE, HARVEY E.
分类号 H01L21/033;H01L21/336;H01L29/49;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L21/033
代理机构 代理人
主权项
地址