IMPREGNATED CATHODE MATERIAL

摘要

PURPOSE:To obtain a cathode material uniformly maintaining Sc distribution even performing heat treatment by implanting Sc<+> from above on the cathode material surface coated with a metal thin film. CONSTITUTION:An alloy with Sc is formed by implanting Sc ion into a metal thin film 4 coating the surface of an impregnation type cathode material. For instance, a W substrate 1 having a porous rate 20-25% is impregnated with a Ba-Ca alminate compound 2 followed by being coated with W up to 500nm by means of electron ray evaporation 4 and subjected to implantation of Sc<+>. Since Sc implanted into the W thin film forms a uniform single atomic layer 3 on the surface while the distribution of work function is uniform the properties of a common impregnated cathode can be obtained at a relatively low temperature.