| 摘要 |
A carrier supports a single lot of prescribed sheets of semiconductor wafers so as to transfer the semiconductor wafers from one processing step to another processing step in their cleaning and etching processing. The carrier, or a container for the carrier, includes an information member holder and an information member detachably supported by the holder. An information member includes a semiconductor chip which constitutes a microprocessor and memory. The above carrier can bring about numerous merits which include: (1) Each processing or treatment apparatus is operated in accordance with instructions given by the information member and instruction errors can be effectively avoided; (2) The completion of each processing or treatment step and other information pertaining the step are all stored in the memory, thereby facilitating correct collation; and (3) The information member may be formed into an information card, which is small in size and extremely convenient for handling.
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