发明名称 FEEDING DEVICE
摘要 PURPOSE:To record a signal having a minute and fine track pitch by connecting a prescribed object to a static pressure air bearing slider via a piezoelectric oscillator and performing a fine feed control by said piezoelectic oscillator. CONSTITUTION:A linear motor 1 is carried to a desired position while its present position is monitored by a position sensor like a laser length measuring device 6, etc. An optical head 3 is attached at the tip of a shaft 10, and a piezoelectric oscillator 9 is set between the head 3 and the motor 1. The present position of the head 3 is monitored by a position sensor like a laser distance measuring device 8, etc. Then the oscillator 9 is moved by an extent equal to the difference between the head 3 and its target position obtained by the motor 1. Thus the oscillator 9 is set at its target position.
申请公布号 JPS6032168(A) 申请公布日期 1985.02.19
申请号 JP19830141045 申请日期 1983.08.03
申请人 HITACHI SEISAKUSHO KK 发明人 HARA FUMIO;KASAI MASUO;KAKU TOSHIMITSU;SAITOU ATSUSHI;TAJIMA TAKESHI;IMAGAWA FUMIO
分类号 F16C32/06;G05D3/00;G11B7/085;G11B21/02;G11B21/10 主分类号 F16C32/06
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