MEJORAS EN HORNO DE VACIO

摘要

A method and apparatus for recirculation of atmosphere in a vacuum furnace which comprises a recirculation loop in which there is a low pressure line from the furnace chamber leading to a recirculation pump which pumps the recycled gas at a higher pressure to a high pressure line back into the furnace chamber. A means to analyze the furnace atmosphere is in communication with the high pressure line and signals its measurements of the atmosphere analysis to a valve on an enriching line. The enriching line passes enriched gas into either the high pressure line or the furnace chamber as the valve opens or closes. A means is provided to withdraw the gas from the furnace chamber in order to maintain the desired furnace chamber pressure as enriching gas is added.