| 摘要 |
PURPOSE:To enable to monitor the photo outputs of a plurality of the titled devices by means of one photo detector by a method wherein the photo output of said device to be tested is guided to an optical switch via optical fiber and then to the photo detector via other optical fiber. CONSTITUTION:The photo outputs of a plurality of the semiconductor devices 2 to be tested placed in a constant temperature bath 1 are guided to the optical switch 5 respectively via optical fibers 4. Then, the photo outputs of said devices 2 are successively guided respectively to one photo detector 3 placed in a constant temperature bath 1' via optical fiber 4'. Thereby, the photo outputs of a plurality of said devices can be monitored by means of one photo detector, and accordingly the test of lifetime can be executed. |
