发明名称 VISUAL INSPECTION DEVICE
摘要 PURPOSE:To detect the bending of a lead in an electronic part with high precision by deciding the acceptable or defective shape of arrangement according to the presence of irregular changes with time of the information of detection and the change of the intensity of detection by a sensor. CONSTITUTION:A reflection type photosensor 11 detects lead groups in an electronic part 1. Since leads 3 are arranged at intervals of pitches (a), outputs for detection from the sensor 11 are detected as pulses. With the electronic part with the bent lead, pulses irregularly appear, and pulse intensity is intensified or weakened. Accordingly, the acceptable or defective positions of the arrangement of the leads can be detected by the regularity of the time intervals of the detection of the leads while the presence of the bending of the leads is detected by an optical detection-intensity change.
申请公布号 JPS61269323(A) 申请公布日期 1986.11.28
申请号 JP19850110303 申请日期 1985.05.24
申请人 HITACHI LTD 发明人 ODAKA TSUNEICHI
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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