| 摘要 |
PURPOSE:To remove the exchange work for grid electrodes at every completion of several processes on the mass production of products such as a-Si solar cells, and to improve operation efficiency by flexibly moving the grid electrode to a wind-up roll from a delivery roll. CONSTITUTION:A metallic mesh 68 wound on a roll 62 fixed to a lower electrode 61 is wound up by a roll 63, and a plane is formed by the tension of both rolls, thus forming a grid electrode. The roll 63 for winding is constituted by shafts 64, 65 and a handle 66, the metallic mesh 68 is wound up on the roll 63 by turning the handle 66, and a novel clean surface appears. A vacuum can be kept by fixing a connecting section between the shaft 64 and a reaction-furnace bell jar 610 by a rubber ring for the vacuum. Accordingly, when glow discharge is generated between both upper and lower electrodes 61, 60, an a-Si film is formed on a substrate and a solar cell is manufactured, the grid electrode on which discharge residues adhere can be wound up easily by the roll 63 without breaking the vacuum in a furnace. |
