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发明名称
PIEZOELEKTRISCHER KONTAMINATIONSDETEKTOR
摘要
申请公布号
DE3422741(A1)
申请公布日期
1985.02.14
申请号
DE19843422741
申请日期
1984.06.19
申请人
LABORATOIRE SUISSE DE RECHERCHES HORLOGERES
发明人
SEKLER,JOERG;ZUMSTEG,ALPHONSE;ERICH HINTERMANN,HANS
分类号
G01N5/02;G01B7/06;(IPC1-7):G01B7/06;G01D3/04;G01K7/16;H01L41/08
主分类号
G01N5/02
代理机构
代理人
主权项
地址
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