| 摘要 |
PURPOSE:To shorten degas time by providing a flange for fixing ion source, electric power supply for heating cathode and vacuum exhaustion unit. CONSTITUTION:A cleaned ion source 8 is fixed on a flange. Vacuum exhaustion turns from basic process into high vacuum process in sequence. In vacuum state, a filament electric power supply 6 under control by the signals from ionization vacuum gauge 5 emits current onto a filament of the ion source 8 to heat it. Degas being emanating through heating aggravates the degree of vacuum, but the filament current rises up to the standard level of use in an ion injection device under constant controls of the ionization vacuum gauge 5 as well as the filament electric power supply 6 to maintain the degree of vacuum as arranged. When the degas is over, the filament current is turned to a minimum replacing dying ion source for continuous use. |
