| 摘要 |
PURPOSE:To move stages simultaneously by sending movement extent data to respective control parts from a CPU, and then sending a movement start signal at a time and moving moving bodies synchronously. CONSTITUTION:The CPU sends out an address and position data written in a transmitting buffer SBF to respective stage control units SAI1-SAIn through a line L. The units SAI1-SAIn decides on the address by an address decision part AD, and checks the number of a motor when the address corresponds to this device, thereby writing the position data in buffers BF1-BF3. Then, the movement start signal is read out of a register R and sent out to units SAI-SAIn. A movement start detection part DET on a unit side detects it to open a NAND gate, and supplies the position data to a servomotor to move stages. |
