PRODUCTION OF MASTER STAMPER

摘要

PURPOSE:To apply repetitively a glass master disk by forming the recessing/projecting grooves for signals and tracks on the master disk with a photoresist and modifyng the resist layer into an insoluble matter through a heating process for solid junction. CONSTITUTION:A resist layer 2 is formed on a cleansed glass master disk 1 for production of a master stamper of an optical disk, etc. Then recessing/projecting grooves for signals and track grooves are formed on the disk 1 through exposure and development, and a remaining resist layer 6 is heated up to >=120 deg.C to secure the solid junction between the disk 1 and the layer 6. Thus the resist layer is insoluble to a resist solution and remains on the disk 1 with no destruction in the subsequent releasing process of a metal layer. Thus the disk 1 can be washed for reuse. Then the 1st and 2nd metallic layers 3 and 4 are formed on the disk 1 including the layer 6 and then released to obtain a master stamper 5. In such a way, the disk 1 is washed and used repetitively.