| 摘要 |
PURPOSE:To provide a titled device which permits desired change of an irradiating shape in laser working in which the expanded luminous flux of a beam expander is irradiated through an aperture having a desired shape by an optical system by reflecting and reading out the aperture and using the same as an aperture image of a special light valve. CONSTITUTION:A laser beam emitted from a laser light source 1 is expanded by a beam expander 21. Only the specific linearly polarized component is reflected by a polarizing beam splitter 31 in the aperture pattern formed to a reflection read-out type bismuth.silica.oxide light valve 32 which is driven 33 by a matrix electrode. Said component passes through the splitter 31 and is irradiated in the pattern shape to a sample 51 by a dichroic mirror 41 and a condenser lens 42. The image of the valve 32 is formed by a mercury lamp 39 and a filter 36 and is erased by xenon flash lamp 35 and therefore the aperture image is easily changed by exchanging the filter 36. |
