| 摘要 |
PURPOSE:To provide a device for producing a deposited film which produces the deposited film having good electrical and optical properties by providing a heating chamber which heats preliminarily a base body to a prescribed temp. on the outside of a reaction chamber and means for transferring the heated substrate to the inside of the reaction chamber. CONSTITUTION:A drum-shaped base body is placed on a moving carriage 32 and is fed 26 into an auxiliary chamber 21, then the inside of the chamber 21 is evacuated and the base body A is set on a base body stage 20 in a heating chamber 2. The base body A is heated to a desired temp. by a heater 14 and the inside of the chamber 2 and auxiliary chambers 21, 22 are evacuated to a vacuum as well. The heated body A is hoisted with a hook 34 and is placed on a moving carriage 33 moved to the inside of the chamber 21 so that the base body is moved into the chamber 22. The body A hooked to a hook 35 is moved through a gate valve 24 into the chamber 1 and a valve 24 is closed. A gaseous material 9 is thereafter introduced through the many small holes of a glass tube 11 into the chamber 1 and a high-frequency is impressed from a high-frequency power source 6 to a cylindrical electrode 3 to generate glow discharge and to decompose the raw material thereby depositing, for example, an amorphous Si film on the body A. |
