SPUTTERING DEVICE

摘要

PURPOSE:To prevent sticking of a sputtering film to the inside of a thin film forming chamber by placing perpendicularly a substrate and target so as to face statically each other, providing the open end of a cylindrical plate for stick- preventive plate covering the target near the substrate and making said plate slightly larger than the substrate. CONSTITUTION:A substrate 6 is held by a holding jig 5 in a thin film forming chamber 1 and a target 3 is held by a cathode 2 in such a way as to face perpendicularly each other. The target 3 is enclosed with a cylindrical stick- preventive plate 7 and a window 10 provided there is made slightly larger than the substrate 6 and is positioned near the substrate 10. The plate 7 is constituted of the same material as the target 3 and a heater 11 is wound around the plate. The sticking of a sputtering film to the wall ans jig in the chamber 1 is prevented as far as possible. If a partition plate 8 is attached near the target 3, the sputtering film sticking to the inside of the plate 7 is contained into a groove 9 even if said film is tripped from the plate.